Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075703 | Immersive oxidation and etching process for cleaning silicon electrodes | Duane Outka, Catherine Zhou, Hong Shih | 2011-12-13 |
| 8022718 | Method for inspecting electrostatic chucks with Kelvin probe analysis | Hong Shih, John Daugherty | 2011-09-20 |
| 7942973 | Methods and apparatus for wet cleaning electrode assemblies for plasma processing apparatuses | Hong Shih, Yaobo Yin, Jason Augustino, Catherine Zhou | 2011-05-17 |
| 7578889 | Methodology for cleaning of surface metal contamination from electrode assemblies | Hong Shih, Yaobo Yin, Shun Wu, John Daugherty, Linda (Tong) Jiang | 2009-08-25 |
| 7052553 | Wet cleaning of electrostatic chucks | Hong Shih, Tuochuan Huang, Catherine Zhou, Bruno Morel, Brian McMillin +1 more | 2006-05-30 |
| 6919689 | Method for toolmatching and troubleshooting a plasma processing system | Seyed Jafar Jafarian-Tehrani | 2005-07-19 |
| 6873114 | Method for toolmatching and troubleshooting a plasma processing system | Seyed Jafar Jafarian-Tehrani | 2005-03-29 |