Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7309869 | Lithographic apparatus, device manufacturing method and radiation system | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2007-12-18 |
| 7230674 | Lithographic apparatus and device manufacturing method | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Cassandra Owen | 2007-06-12 |
| 7221515 | Optical diffraction element | Gert Wim 'T Hooft, Coen Theodorus Hubertus Fransiscus Liedenbaum, Robert Hendriks | 2007-05-22 |
| 7145641 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Cassandra Owen | 2006-12-05 |
| 7142287 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Peter Dirksen, Cassandra Owen | 2006-11-28 |
| 7116394 | Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system | Levinus Pieter Bakker, Bastiaan Mertens, Markus Weiss, Johann Trenkler, Wolfgang Singer | 2006-10-03 |
| 7105837 | Lithographic apparatus, device manufacturing method and radiation system | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans, Jan Evert Van Der Werf | 2006-09-12 |
| 7075617 | Device manufacturing method and a lithographic apparatus | Aleksey Yurievich Kolesnychenko, Carolus Ida Maria Antonius Spee | 2006-07-11 |
| 7034308 | Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby | Levinus Pieter Bakker, Vadim Yevgenyevich Banine, Frank Jeroen Pieter Schuurmans, Yurii Victorovitch Sidelnikov | 2006-04-25 |
| 6954257 | Lithographic apparatus and device manufacturing method | Andrei Evgenuevich Iakchine Yakshin | 2005-10-11 |
| 6882406 | EUV LITHOGRAPHIC PROJECTION APPARATUS COMPRISING AN OPTICAL ELEMENT WITH A SELF-ASSEMBLED MONOLAYER, OPTICAL ELEMENT WITH A SELF-ASSEMBLED MONOLAYER, METHOD OF APPLYING A SELF-ASSEMBLED MONOLAYER, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY | Jacob Wijdenes | 2005-04-19 |
| 6791665 | Lithographic projection apparatus and device manufacturing method | Levinus Pieter Bakker, Frank Jeroen Pieter Schuurmans | 2004-09-14 |