Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8689606 | Gas sensing using ultrasound | Martijn Schellekens, Josephus Arnoldus Henricus Maria Kahlman, Martinus Gernardus Van Der Mark | 2014-04-08 |
| 8686376 | Microarray characterization system and method | Reinhold Wimberger-Friedl, Marius Iosif Boamfa, Erik Martinus Hubertus Petrus Van Dijk | 2014-04-01 |
| 8401513 | Proximity sensor, in particular microphone for reception of sound signals in the human audible sound range, with ultrasonic proximity estimation | Geert Langereis, Twan Van Lippen, Frank Pasveer | 2013-03-19 |
| 8343424 | Analysis device with an array of focusing microstructures | Yuri Aksenov, Fredericus Christiaan Van Den Heuvel, Johannes Arnoldus Jacobus Maria Kwinten | 2013-01-01 |
| 8327521 | Method for production and using a capacitive micro-machined ultrasonic transducer | Anthonie Van Der Lugt | 2012-12-11 |
| 8193685 | Thin film detector for presence detection | Mareike Klee, Ronald Dekker, Harry Van Esch, Marco De Wild, Ruediger Mauczok +11 more | 2012-06-05 |
| 8148052 | Double patterning for lithography to increase feature spatial density | Anja Monique Vanleenhove, David Van Steenwinckel, Gerben Doornbos, Casper Juffermans, Mark van Dal | 2012-04-03 |
| 8067147 | Removable pellicle for immersion lithography | Robert Duncan Morton, Peter Zandbergen, David Van Steenwinckel, Yuri Aksenov, Jeroen Herman Lammers +2 more | 2011-11-29 |
| RE42849 | Lithographic apparatus and device manufacturing method | Paulus Cornelis Duineveld, Aleksey Yurievich Kolesnychenko, Helmar Van Santen | 2011-10-18 |
| 7659041 | Lithographic method of manufacturing a device | Casparus Anthonius Henricus Juffermans, Johannes Van Wingerden | 2010-02-09 |
| 7599811 | Sensor for lithographic apparatus and method of obtaining measurements of lithographic apparatus | Frits Jurgen Van Hout, Josephus Antonius Maria Van Bommel, Mark Kroon, Casparus Anthonius Henricus Juffermans, Renatus Maria Adrianus Mathias Van Den Eijnden | 2009-10-06 |
| 7423739 | Method of and system for determining the aberration of an imaging system test object and detector for use with the method | Casparus Anthonius Henricus Juffermans, Augustus Josephus Elizabeth Maria Janssen | 2008-09-09 |
| 7230674 | Lithographic apparatus and device manufacturing method | Mark Kroon, Michael Cornelis Van Beek, Ralph Kurt, Cassandra Owen | 2007-06-12 |
| 7145641 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Ralph Kurt, Cassandra Owen | 2006-12-05 |
| 7142287 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Michael Cornelis Van Beek, Ralph Kurt, Cassandra Owen | 2006-11-28 |
| 7050146 | Lithographic apparatus and device manufacturing method | Paulus Cornelis Duineveld, Aleksey Yurievich Kolesnychenko, Helmar Van Santen | 2006-05-23 |
| 7037626 | Lithographic method of manufacturing a device | Casparus Anthonius Henricus Juffermans, Johannes Van Wingerden | 2006-05-02 |
| 6960764 | Method of measuring the performance of a scanning electron microscope | Rene Elfrink, Casparus Anthonius Henricus Juffermans | 2005-11-01 |
| 6544694 | Method of manufacturing a device by means of a mask phase-shifting mask for use in said method | Casparus Anthonius Henricus Juffermans | 2003-04-08 |
| 6417922 | Alignment device and lithographic apparatus comprising such a device | Antonius Maarten Nuijs | 2002-07-09 |
| 6368763 | Method of detecting aberrations of an optical imaging system | Casparus Anthonius Henricus Juffermans | 2002-04-09 |
| 6331368 | Test object for use in detecting aberrations of an optical imaging system | Casparus Anthonius Henricus Juffermans | 2001-12-18 |
| 6248486 | Method of detecting aberrations of an optical imaging system | Casparus Anthonius Henricus Juffermans | 2001-06-19 |
| 6160622 | Alignment device and lithographic apparatus comprising such a device | Antonius Maarten Nuijs | 2000-12-12 |
| 6046792 | Differential interferometer system and lithographic step-and-scan apparatus provided with such a system | Jan Evert Van Der Werf | 2000-04-04 |