Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5917604 | Alignment device and lithographic apparatus provided with such a device | Jan Evert Van Der Werf, Manfred Gawein Tenner | 1999-06-29 |
| 5910847 | Method of determining the radiation dose in a lithographic apparatus | Jan Evert Van Der Werf, Manfred Gawein Tenner | 1999-06-08 |
| 5674650 | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Jan Evert Van Der Werf | 1997-10-07 |
| 5673101 | Method of repetitively imaging a mask pattern on a substrate, and apparatus for performing the method | Manfred Gawein Tenner, Jan Evert Van Der Werf, Cornelis M. J. Van Uijen | 1997-09-30 |
| 5485272 | Radiation-source unit for generating a beam having two directions of polarisation and two frequencies | Manfred Gawein Tenner, Jan Evert Van Der Werf | 1996-01-16 |