Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Alex Pokrovskiy, Abdurrahman Sezginer, Weston L. Sousa | 2019-05-14 |
| 10168273 | Methods and apparatus for polarizing reticle inspection | Haifeng Huang, Damon F. Kvamme, Amrish Kelkar | 2019-01-01 |
| 10140698 | Polygon-based geometry classification for semiconductor mask inspection | Yin Xu, Wenfei Gu | 2018-11-27 |
| 9863761 | Critical dimension uniformity monitoring for extreme ultraviolet reticles | Alex Pokrovskiy, Abdurrahman Sezginer, Weston L. Sousa | 2018-01-09 |
| 9778207 | Integrated multi-pass inspection | Weston L. Sousa, Yalin Xiong | 2017-10-03 |
| 9766185 | Block-to-block reticle inspection | Abdurrahman Sezginer, Patrick LoPresti, Joe Blecher, Yalin Xiong, John Fielden | 2017-09-19 |
| 9733640 | Method and apparatus for database-assisted requalification reticle inspection | Lih-Huah Yiin, Venkatraman Iyer | 2017-08-15 |
| 9612541 | Qualifying patterns for microlithography | Mark Wagner | 2017-04-04 |
| 9607371 | Mesoscopic defect detection for reticle inspection | Zhian Guo, Bing Li | 2017-03-28 |
| 9574227 | Method for detecting variation of gene for non-diagnostic purpose based on fluorescence quenching and probe thereof | Bochun Huang | 2017-02-21 |
| 9547892 | Apparatus and methods for predicting wafer-level defect printability | Abdurrahman Sezginer | 2017-01-17 |
| 9478019 | Reticle inspection using near-field recovery | Abdurrahman Sezginer | 2016-10-25 |
| 9417191 | Using reflected and transmission maps to detect reticle degradation | Carl Hess | 2016-08-16 |
| 9092847 | Detection of thin lines for selective sensitivity during reticle inspection using processed images | Zhengyu Wang, Lih-Huah Yiin, Bing Li | 2015-07-28 |
| 8855400 | Detection of thin lines for selective sensitivity during reticle inspection using processed images | Zhengyu Wang, Lih-Huah Yiin, Bing Li | 2014-10-07 |
| 7995832 | Photomask inspection and verification by lithography image reconstruction using imaging pupil filters | Yalin Xiong | 2011-08-09 |
| 7962863 | Computer-implemented methods, systems, and computer-readable media for determining a model for predicting printability of reticle features on a wafer | Bo SU, Gaurav Verma, Hong Du, Scott Sturges Andrews | 2011-06-14 |
| 7546573 | Semiconductor device pattern generation | Guarav Verma | 2009-06-09 |
| 6704103 | Coatings for sensitivity enhancement of signal from glass disks | Carlos Alberto Duran | 2004-03-09 |
| 6184992 | Apparatus and method for measuring flying height and a real index of refraction | Carlos Alberto Duran | 2001-02-06 |
| 5911025 | Method for the preparation of optical fibers | A. F. Garito, Chris Koeppen, Weidong Chen | 1999-06-08 |
| 5729645 | Graded index optical fibers | A. F. Garito, Chris Koeppen, Weidong Chen | 1998-03-17 |