Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11727556 | Defect detection for multi-die masks | Wenfei Gu, Pei-Chun Chiang | 2023-08-15 |
| 11557031 | Integrated multi-tool reticle inspection | Sterling Watson | 2023-01-17 |
| 10866197 | Dispositioning defects detected on extreme ultraviolet photomasks | Vikram Tolani, Masaki Satake | 2020-12-15 |
| 10451563 | Inspection of photomasks by comparing two photomasks | Yalin Xiong, Carl Hess | 2019-10-22 |
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Alex Pokrovskiy, Abdurrahman Sezginer | 2019-05-14 |
| 9863761 | Critical dimension uniformity monitoring for extreme ultraviolet reticles | Rui-fang Shi, Alex Pokrovskiy, Abdurrahman Sezginer | 2018-01-09 |
| 9778207 | Integrated multi-pass inspection | Yalin Xiong, Rui-fang Shi | 2017-10-03 |
| 9110039 | Auto-focus system and methods for die-to-die inspection | Michael J. Wright, Zhengcheng Lin, Wilfred L. Ghonsalves, Daniel L. Belin | 2015-08-18 |
| 7599051 | Calibration of a substrate inspection tool | Steven Labovitz | 2009-10-06 |