Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10288415 | Critical dimension uniformity monitoring for extreme ultra-violet reticles | Rui-fang Shi, Abdurrahman Sezginer, Weston L. Sousa | 2019-05-14 |
| 9863761 | Critical dimension uniformity monitoring for extreme ultraviolet reticles | Rui-fang Shi, Abdurrahman Sezginer, Weston L. Sousa | 2018-01-09 |