Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7501335 | Semiconductor device and manufacturing method of the same | Katsuyuki Sekine, Yoshitaka Tsunashima, Akio Kaneko, Motoyuki Sato, Kazuhiro Eguchi | 2009-03-10 |
| 7427518 | Semiconductor device fabrication method and fabrication apparatus | Katsuyuki Sekine, Motoyuki Sato, Akio Kaneko, Kazuhiro Eguchi | 2008-09-23 |
| 7375403 | Semiconductor device and method of manufacturing the same | Akio Kaneko, Katsuyuki Sekine, Kazuhiro Eguchi, Motoyuki Sato | 2008-05-20 |
| 7368780 | Semiconductor memory device and method of manufacturing the same | Masayuki Tanaka, Yoshio Ozawa, Hirokazu Ishida, Katsuaki Natori | 2008-05-06 |
| 7306994 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Yasumasa Suizu, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2007-12-11 |
| 7294878 | Semiconductor memory device and method of manufacturing the same | Masayuki Tanaka, Yoshio Ozawa, Hirokazu Ishida, Katsuaki Natori | 2007-11-13 |
| 7282774 | Semiconductor device and method for manufacturing semiconductor device | Kazuhiro Eguchi, Yoshitaka Tsunashima | 2007-10-16 |
| 7265427 | Semiconductor apparatus and method of manufacturing the semiconductor apparatus | Akio Kaneko, Kazuhiro Eguchi, Katsuyuki Sekine, Motoyuki Sato | 2007-09-04 |
| 7220681 | Semiconductor device and method of fabricating the same | Katsuyuki Sekine, Akio Kaneko, Motoyuki Sato, Kazuhiro Eguchi | 2007-05-22 |
| 7141466 | Method of fabricating semiconductor device having gate insulating film comprising a silicate nitride film with interface insulating film | Motoyuki Sato, Kazuhiro Eguchi, Katsuyuki Sekine, Akio Kaneko | 2006-11-28 |
| 7129125 | Semiconductor device and manufacturing method thereof including heating a silicon oxide in a helium gas | Katsuyuki Sekine, Ichiro Mizushima | 2006-10-31 |
| 7101775 | Semiconductor device and method for manufacturing semiconductor device | Kazuhiro Eguchi, Yoshitaka Tsunashima | 2006-09-05 |
| 7091135 | Method of manufacturing semiconductor device | Kazuhiro Eguchi | 2006-08-15 |
| 6924536 | Semiconductor device and its manufacturing method | Akira Nishiyama | 2005-08-02 |
| 6844234 | Semiconductor device and method for manufacturing semiconductor device | Kazuhiro Eguchi, Yoshitaka Tsunashima | 2005-01-18 |
| 6787827 | Semiconductor device and method for manufacturing the same | Katsuhiko Hieda, Tetsuo Matsuda, Yoshio Ozawa | 2004-09-07 |
| 6784508 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Yasumasa Suizu, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2004-08-31 |
| 6664592 | Semiconductor device with groove type channel structure | Tomohiro Saito, Atsushi Yagishita, Katsuhiko Hieda, Toshihiko Iinuma | 2003-12-16 |
| 6515338 | Semiconductor device and manufacturing method therefor | Tomohiro Saito, Atsushi Yagishita, Katsuhiko Hieda, Toshihiko Iinuma | 2003-02-04 |
| 6403997 | Method for manufacturing semiconductor devices | Katsuhiko Hieda, Tetsuo Matsuda, Yoshio Ozawa | 2002-06-11 |
| 6383856 | Semiconductor device and method for manufacturing the same | Yoshio Ozawa | 2002-05-07 |
| 6313047 | MOCVD method of tantalum oxide film | Kazuhide Hasebe, Yuichiro Morozumi, Dong-Kyun Choi, Takuya Sugawara, Yoshitaka Tsunashima | 2001-11-06 |
| 6294481 | Semiconductor device and method for manufacturing the same | Yoshio Ozawa | 2001-09-25 |
| 6251763 | Semiconductor device and method for manufacturing same | Katsuhiko Hieda, Tetsuo Matsuda, Yoshio Ozawa | 2001-06-26 |
| 6054355 | Method of manufacturing a semiconductor device which includes forming a dummy gate | Tomohiro Saito, Atsushi Yagishita, Katsuhiko Hieda, Toshihiko Iinuma | 2000-04-25 |