Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7947610 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2011-05-24 |
| 7544593 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Ihumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2009-06-09 |
| 7425480 | Semiconductor device and method of manufacture thereof | Yoshio Ozawa, Yoshitaka Tsunashima | 2008-09-16 |
| 7312138 | Semiconductor device and method of manufacture thereof | Yoshio Ozawa, Yoshitaka Tsunashima | 2007-12-25 |
| 7306994 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2007-12-11 |
| 7303946 | Method of manufacturing a semiconductor device using an oxidation process | Yoshio Ozawa, Yoshitaka Tsunashima | 2007-12-04 |
| 6784508 | Semiconductor device having a gate insulating film structure including an insulating film containing metal, silicon and oxygen and manufacturing method thereof | Yoshitaka Tsunashima, Seiji Inumiya, Yoshio Ozawa, Kiyotaka Miyano, Masayuki Tanaka | 2004-08-31 |
| 6759314 | Method for manufacturing semiconductor devices using thermal nitride films as gate insulating films | Wakako Moriyama, Naoki Kai, Hiroaki Hazama, Keiki Nagai, Yuji Fukazawa +2 more | 2004-07-06 |
| 5279973 | Rapid thermal annealing for semiconductor substrate by using incoherent light | — | 1994-01-18 |