Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7655559 | Post-CMP treating liquid and manufacturing method of semiconductor device using the same | Gaku Minamihaba, Hiroyuki Yano | 2010-02-02 |
| 7521350 | Manufacturing method of a semiconductor device | Gaku Minamihaba, Dai Fukushima, Yoshikuni Tateyama, Hiroyuki Yano | 2009-04-21 |
| 7498259 | Through electrode and method for forming the same | Takaharu Yamano | 2009-03-03 |
| 7494931 | Method for fabricating semiconductor device and polishing method | Dai Fukushima, Gaku Minamihaba, Hiroyuki Yano, Susumu Yamamoto | 2009-02-24 |
| 7307344 | Semiconductor device including a discontinuous film and method for manufacturing the same | Gaku Minamihaba, Hiroyuki Yano, Susumu Yamamoto | 2007-12-11 |
| 7198729 | CMP slurry and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano | 2007-04-03 |
| 7105423 | Method of manufacturing semiconductor device | Takaharu Yamano | 2006-09-12 |
| 7042099 | Semiconductor device containing a dummy wire | Gaku Minamihaba, Dai Fukushima, Yoshikuni Tateyama, Hiroyuki Yano | 2006-05-09 |
| 6995090 | Polishing slurry for use in CMP of SiC series compound, polishing method, and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano | 2006-02-07 |
| 6945854 | Semiconductor device fabrication method and apparatus | Gaku Minamihaba | 2005-09-20 |
| 6935928 | Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method | Kazuhito Uchikura, Kazuo Nishimoto, Masayuki Hattori, Nobuo Kawahashi, Hiroyuki Yano +3 more | 2005-08-30 |
| 6924227 | Slurry for chemical mechanical polishing and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano, Nobuo Kawahashi, Masayuki Hattori, Kazuo Nishimoto | 2005-08-02 |
| 6858539 | Post-CMP treating liquid and method for manufacturing semiconductor device | Gaku Minamihaba, Yukiteru Matsui, Hiroyuki Yano | 2005-02-22 |
| 6790769 | CMP slurry and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano | 2004-09-14 |
| 6737363 | Method of manufacturing semiconductor device | Hideshi Miyajima, Nobuhide Yamada, Nobuo Hayasaka | 2004-05-18 |