Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906258 | Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device | Kazutaka Ishigo, Noriaki Sasaki, Masayuki Hatano | 2011-03-15 |
| 7630052 | Exposure processing system, exposure processing method and method for manufacturing a semiconductor device | Takuya Kono, Tatsuhiko Higashiki, Shoichi Harakawa, Makato Ikeda | 2009-12-08 |
| 7164960 | Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device | Shigeki Nojima, Keita Asanuma | 2007-01-16 |
| 7092068 | Reticle, exposure monitoring method, exposure method and manufacturing method for semiconductor device | — | 2006-08-15 |
| 6872508 | Exposure method and method of manufacturing semiconductor device | Keita Asanuma, Tatsuhiko Higashiki | 2005-03-29 |
| 6866976 | Monitoring method, exposure method, a manufacturing method for a semiconductor device, including an etching method and exposure processing unit | Masafumi Asano, Soichi Inoue | 2005-03-15 |