Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534870 | Apparatus and method for manufacturing a semiconductor device | Yoshiaki Shimooka, Noriaki Matsunaga, Rempei Nakata, Hideshi Miyajima, Motonobu Kawai | 2003-03-18 |
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2002-08-27 |
| 6368951 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2002-04-09 |
| 6307265 | Feasible, gas-dielectric interconnect process | Minakshisundaran Balasubramanian Anand, Masaki Yamada | 2001-10-23 |
| 6306753 | Feasible, gas-dielectric interconnect process | Minakshisundaran Balasubramanian Anand, Masaki Yamada | 2001-10-23 |
| 6291891 | Semiconductor device manufacturing method and semiconductor device | Kazuyuki Higashi, Noriaki Matsunaga, Akihiro Kajita, Tetsuo Matsuda, Tadashi Iijima +5 more | 2001-09-18 |
| 6163067 | Semiconductor apparatus having wiring groove and contact hole in self-alignment manner | Masahiro Inohara, Tadashi Matsuno | 2000-12-19 |
| 6071810 | Method of filling contact holes and wiring grooves of a semiconductor device | Junichi Wada, Atsuko Sakata, Tomio Katata, Takamasa Usui, Masahiko Hasunuma +3 more | 2000-06-06 |
| 5982040 | Semiconductor device and method for manufacturing the same | Masaki Yamada, Minakshisundaran Balasubramanian Anand | 1999-11-09 |
| 5976972 | Method of making semiconductor apparatus having wiring groove and contact hole formed in a self-alignment manner | Masahiro Inohara, Tadashi Matsuno | 1999-11-02 |
| 5917223 | Semiconductor device having salicide layer | Kazuya Ohuchi | 1999-06-29 |
| 5814541 | Method for manufacturing semiconductor device | — | 1998-09-29 |
| 5759915 | Method of forming semiconductor device having an improved buried electrode formed by selective CVD | Noriaki Matsunaga, Tadashi Matsuno, Takamasa Usui | 1998-06-02 |
| D384935 | Roof plate with solar battery | Tadashi Fukuhara, Takayuki Saito, Katsuji Mukai, Kimitoshi Fukae, Yuji Inoue +1 more | 1997-10-14 |
| D380442 | Roof plate with solar battery | Tadashi Fukuhara, Takayuki Saito, Katsuji Mukai, Kimitoshi Fukae, Yuji Inoue +1 more | 1997-07-01 |
| 5350712 | Method of manufacturing a semiconductor IC device having multilayer interconnection structure | — | 1994-09-27 |
| 5330934 | Method of fabricating a semiconductor device having miniaturized contact electrode and wiring structure | Naoki Ikeda | 1994-07-19 |
| 5258329 | Method for manufacturing a multi-layered interconnection structure for a semiconductor IC structure | — | 1993-11-02 |
| 5243220 | Semiconductor device having miniaturized contact electrode and wiring structure | Naoki Ikeda | 1993-09-07 |
| 5184205 | Semiconductor device having multi-layered wiring, and method of manufacturing the same | — | 1993-02-02 |
| 5106782 | Method of manufacturing a semiconductor device | Tadashi Matsuno, Kazuhiko Hashimoto, Hisayo Momose | 1992-04-21 |
| 5023679 | Semiconductor device | — | 1991-06-11 |
| 4916084 | Method for manufacturing MOS semiconductor devices | Mitsuchika Saitoh | 1990-04-10 |
| 4754318 | Semiconductor device | Hiroshi Momose, Hiroshi Nozawa | 1988-06-28 |