Issued Patents All Time
Showing 101–121 of 121 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7274450 | Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems | Steven E. Green, Ping He, Galen L. Pfeiffer, Brian D. Guenther, Gerald T. Cooney +3 more | 2007-09-25 |
| 7265838 | Method of calibrating effects of multi-AOI-system for easy changing angles-of-incidence in ellipsometers and the like | Blaine D. Johs, Ping He, Christopher A. Goeden, John A. Woollam, James D. Welch | 2007-09-04 |
| 7253900 | Ellipsometer or polarimeter and the like system with multiple detector element detector in environmental control chamber including secure sample access | John A. Woollam, Gregory K. Pribil, James D. Welch | 2007-08-07 |
| 7245376 | Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter | Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-07-17 |
| 7230699 | Sample orientation system and method | Ping He | 2007-06-12 |
| 7215424 | Broadband ellipsometer or polarimeter system including at least one multiple element lens | Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-05-08 |
| 7215423 | Control of beam spot size in ellipsometer and the like systems | Blaine D. Johs, John A. Woollam, James D. Welch | 2007-05-08 |
| 7193710 | Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lenses | Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He +1 more | 2007-03-20 |
| 7158231 | Spectroscopic ellipsometer and polarimeter systems | John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Ping He, Galen L. Pfeiffer | 2007-01-02 |
| 7136162 | Alignment of ellipsometer beam to sample surface | Craig M. Herzinger, Brian D. Guenther, Steven E. Green, Galen L. Pfeiffer, Ping He | 2006-11-14 |
| 7136172 | System and method for setting and compensating errors in AOI and POI of a beam of EM radiation | Blaine D. Johs, Christopher A. Goeden, Galen L. Pfeiffer | 2006-11-14 |
| 7084978 | Sample orientation system and method | — | 2006-08-01 |
| 7075650 | Discrete polarization state spectroscopic ellipsometer system and method of use | Blaine D. Johs, Ping He, Jeffrey S. Hale | 2006-07-11 |
| 7057717 | System for and method of investigating the exact same point on a sample substrate with at least two wavelengths | Blaine D. Johs, Craig M. Herzinger, Ping He, Christopher A. Goeden, John A. Woollam +1 more | 2006-06-06 |
| 6982792 | Spectrophotometer, ellipsometer, polarimeter and the like systems | John A. Woollam, Steven E. Green, Ping He, Blaine D. Johs, Craig M. Herzinger +2 more | 2006-01-03 |
| 6950182 | Functional equivalent to spatial filter in ellipsometer and the like systems | Blaine D. Johs, Craig M. Herzinger, Ping He | 2005-09-27 |
| 6930813 | Spatial filter source beam conditioning in ellipsometer and the like systems | Blaine D. Johs, Craig M. Herzinger, Ping He, James D. Welch | 2005-08-16 |
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Blaine D. Johs, Ping He, Christopher A. Goeden, John A. Woollam, James D. Welch | 2005-02-22 |
| 6804004 | Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry | Blaine D. Johs, Craig M. Herzinger, Ping He | 2004-10-12 |
| 6590655 | System and method of improving electromagnetic radiation beam characteristics in ellipsometer and the like systems | James D. Welch, Blaine D. Johs, Ping He | 2003-07-08 |
| 6456376 | Rotating compensator ellipsometer system with spatial filter | Blaine D. Johs, Craig M. Herzinger, Ping He | 2002-09-24 |