Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476136 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2022-10-18 |
| 10886151 | Heating apparatus and substrate processing apparatus | Takeshi Saikusa, Takayuki Fukudome | 2021-01-05 |
| 10504757 | Substrate processing apparatus and method of adjusting substrate processing apparatus | Takeshi Saikusa, Eiichi Sekimoto, Takayuki Fukudome, Kousuke Yoshihara, Suguru Enokida +2 more | 2019-12-10 |
| 8916804 | Heat treatment method, recording medium having recorded program for executing heat treatment method, and heat treatment apparatus | — | 2014-12-23 |
| 8378272 | Heat treatment apparatus, heat treatment method and storage medium | Tsutomu FUKUNAGA, Yasuhiro Uchida | 2013-02-19 |
| 8138456 | Heat processing method, computer-readable storage medium, and heat processing apparatus | Yoshiteru Fukuda, Shouken Moro | 2012-03-20 |
| 7049553 | Substrate processing apparatus and substrate processing method | Nobuyuki Sata, Toshichika Takei, Masatoshi Kaneda | 2006-05-23 |