Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8748780 | Substrate processing apparatus, substrate processing method, and computer-readable storage medium | Yasuhiro Takaki, Masatoshi Kaneda | 2014-06-10 |
| 8138456 | Heat processing method, computer-readable storage medium, and heat processing apparatus | Yoshiteru Fukuda, Kenichi Shigetomi | 2012-03-20 |