Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249494 | Remote plasma cleaning of chambers for electronics manufacturing systems | Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan, See-Eng Phan +3 more | 2025-03-11 |
| 11932950 | Organic contamination free surface machining | Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal, Matvey Farber +7 more | 2024-03-19 |
| 11854773 | Remote plasma cleaning of chambers for electronics manufacturing systems | Sheng Guo, Marek Radko, Steve Sansoni, Xiaoxiong Yuan, See-Eng Phan +3 more | 2023-12-26 |
| 11735420 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Liqi Wu +5 more | 2023-08-22 |
| 11555250 | Organic contamination free surface machining | Sheng Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal, Matvey Farber +7 more | 2023-01-17 |
| 11508610 | Substrate support with edge seal | Chang Ke, Bonnie T. Chia, Song-Moon Suh, Cheng-Hsiung Tsai, Lei Zhou +1 more | 2022-11-22 |
| 10770292 | Wafer treatment for achieving defect-free self-assembled monolayers | Chang Ke, Lei Zhou, Biao Liu, Cheng Pan, Liqi Wu +5 more | 2020-09-08 |
| 9925639 | Cleaning of chamber components with solid carbon dioxide particles | Song-Moon Suh, Guangchi Xuan, Pulkit Agarwal | 2018-03-27 |