Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10627725 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Hiroshi Shirasu | 2020-04-21 |
| 10228625 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Hiroshi Shirasu | 2019-03-12 |
| 9846371 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hirotaka Kohno +6 more | 2017-12-19 |
| 9366974 | Movable body apparatus, pattern forming apparatus and pattern forming method, device manufacturing method, manufacturing method of movable body apparatus, and movable body drive method | Yasuo Aoki, Hiroshi Shirasu | 2016-06-14 |
| 9268237 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hirotaka Kohno +6 more | 2016-02-23 |
| 9019467 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hirotaka Kohno +6 more | 2015-04-28 |
| 8384880 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hirotaka Kohno +6 more | 2013-02-26 |
| 8208117 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hirotaka Kohno +6 more | 2012-06-26 |
| 8040491 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa | 2011-10-18 |
| 7483119 | Exposure method, substrate stage, exposure apparatus, and device manufacturing method | Soichi Owa, Nobutaka Magome, Shigeru Hirukawa, Jiro Inoue, Hiroyuki Nagasaka | 2009-01-27 |
| 4842842 | Process for producing .alpha.-form gypsum hemihydrate | — | 1989-06-27 |
| 4802966 | Method for treating liquid used for absorbing gaseous sulfur dioxide in the process for desulfurization of combustion exhaust gas | Haruo Aoki | 1989-02-07 |
| 4766309 | Air flow shielding attachment for use in projection type exposure apparatus | — | 1988-08-23 |
| 4659208 | Method and mechanism for preventing misoperation of dual mode copying machine | Masayuki Miyazaki, Seizi Takahashi, Chiharu Kobayashi, Akira Sawaki | 1987-04-21 |
| 4578257 | Process for removing sulfur dioxide from off-gas | Eiji Yoshida | 1986-03-25 |
| 4554140 | Off-gas desulfurization process | — | 1985-11-19 |
| 4538231 | Circuit for electric power source | Shunichi Abe, Mitsuo Akiyama | 1985-08-27 |
| 4497870 | Magneto-optical recording medium | Hidetsugu Kawabata, Masahiro Birukawa, Noriaki Hara, Akira Muto | 1985-02-05 |
| 4448404 | Device for holding a sheet-like sample | Koji Ogawa, Yoshihiko Ohtsuki, Hideo Maeda, Naoto Kihara | 1984-05-15 |
| 4367205 | Process for removing sulfur dioxide from combustion exhaust gas | Yukio Suzuki, Mituru Otomo | 1983-01-04 |
| 4288421 | Process of treating exhaust gas containing nitrogen oxides and sulfur dioxide | Hiroshi Hagiwara | 1981-09-08 |
| 4255401 | Treatment of exhaust gas containing sulfur oxides and nitrogen oxides | Kohki Nomoto | 1981-03-10 |
| 4235852 | Process for treating an exhaust gas containing nitrogen oxides and sulfur oxides | Kohki Nomoto | 1980-11-25 |