Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2010-06-29 |
| 7247848 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2007-07-24 |
| 7183562 | Charged-particle-beam mapping projection-optical systems and methods for adjusting same | Hiroshi Nishimura, Kinya Kato, Toru Takagi, Akihiro Goto, Junji Ikeda +1 more | 2007-02-27 |
| 7064339 | Charged-particle-beam mapping projection-optical systems and methods for adjusting same | Hiroshi Nishimura, Kinya Kato, Toru Takagi, Akihiro Goto, Junji Ikeda +1 more | 2006-06-20 |
| 6765217 | Charged-particle-beam mapping projection-optical systems and methods for adjusting same | Hiroshi Nishimura, Kinya Kato, Toru Takagi, Akihiro Goto, Junji Ikeda +1 more | 2004-07-20 |
| 6717145 | Mapping electron microscopes exhibiting improved imaging of specimen having chargeable bodies | Toru Takagi | 2004-04-06 |
| 6593152 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2003-07-15 |
| 4448404 | Device for holding a sheet-like sample | Koji Ogawa, Yoshihiko Ohtsuki, Yoshihiko Kudo, Hideo Maeda | 1984-05-15 |