| 7160821 |
Method of depositing low k films |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2007-01-09 |
| 6806207 |
Method of depositing low K films |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2004-10-19 |
| 6709715 |
Plasma enhanced chemical vapor deposition of copolymer of parylene N and comonomers with various double bonds |
Chi-I Lang, Shin-Puu Jeng, Fong Chang, Peter Wai-Man Lee, David Cheung |
2004-03-23 |
| 6593247 |
Method of depositing low k films using an oxidizing plasma |
Tzu-Fang Huang, Yung-Cheng Lu, Li-Qun Xia, Ellie Yieh, Wai-Fan Yau +5 more |
2003-07-15 |
| 6086952 |
Chemical vapor deposition of a copolymer of p-xylylene and a multivinyl silicon/oxygen comonomer |
Chi-I Lang, Fong Chang, Peter Wai-Man Lee, Shin-Puu Jeng, David Cheung |
2000-07-11 |
