Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152192 | Plasma processing apparatus and method | Naoki Yasui, Norihiko Ikeda, Tooru Aramaki | 2021-10-19 |
| 9899241 | Plasma processing method | Shunsuke Kanazawa | 2018-02-20 |
| 8931294 | Cooling unit and work piece conveying equipment using it | Takaya Yamada | 2015-01-13 |
| 8486291 | Plasma processing method | Takeshi Ohmori, Hiroaki Ishimura, Hitoshi Kobayashi, Masamichi Sakaguchi | 2013-07-16 |
| 8277563 | Plasma processing method | Masunori Ishihara, Masamichi Sakaguchi, Yutaka Kudou, Satoshi Une | 2012-10-02 |
| 8203101 | Conveying device | Akira Miyamoto, Daisuke Sado, Akira Okamoto, Hideki Matsuo | 2012-06-19 |
| 8114244 | Method for etching a sample | Kousa Hirota, Hiroshige Uchida | 2012-02-14 |
| 8075733 | Plasma processing apparatus | Seiichi Watanabe, Naoki Yasui, Susumu Tauchi | 2011-12-13 |
| 7909933 | Plasma processing method | Masunori Ishihara, Masamichi Sakaguchi, Yutaka Kudou, Satoshi Une | 2011-03-22 |
| 7112805 | Vacuum processing apparatus and vacuum processing method | Yoshitaka Kai, Kenichi Kuwabara, Takeo Uchino, Takeshi Oono, Takeshi Shimada | 2006-09-26 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Tetsuo Ono, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2006-05-23 |
| 6946847 | Impedance matching device provided with reactance-impedance table | Shuji Omae, Masakatsu Mito, Yuji Ishida, Koji Itadani | 2005-09-20 |
| 6677244 | Specimen surface processing method | Tetsuo Ono, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2004-01-13 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Takashi Sato, Naoyuki Kofuji, Masaru Izawa, Yasushi Goto +7 more | 2002-12-10 |
| 6291999 | Plasma monitoring apparatus | Michio Taniguchi, Kazuki Kondo | 2001-09-18 |