Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283453 | Creating multiple electron beams with a photocathode film | Youfei Jiang, Michael Steigerwald, Ralph Nyffenegger | 2025-04-22 |
| 12165831 | Method and system of image-forming multi-electron beams | Christopher Sears, Youfei Jiang, Sameet K. Shriyan, Jeong Ho Lee, Michael Steigerwald +1 more | 2024-12-10 |
| 12165838 | Joint electron-optical columns for flood-charging and image-forming in voltage contrast wafer inspections | Christopher Sears | 2024-12-10 |
| 12068129 | Tilt-column multi-beam electron microscopy system and method | Youfei Jiang, Ralph Nyffenegger, Michael Steigerwald | 2024-08-20 |
| 11869743 | High throughput multi-electron beam system | — | 2024-01-09 |
| 11651934 | Systems and methods of creating multiple electron beams | Sameet K. Shriyan, Luca Grella, Kevin Cummings, Christopher Sears | 2023-05-16 |
| 11508591 | High resolution electron beam apparatus with dual-aperture schemes | Christopher Sears, Nikolai Chubun, Luca Grella | 2022-11-22 |
| 11335608 | Electron beam system for inspection and review of 3D devices | Christopher Sears | 2022-05-17 |
| 11056312 | Micro stigmator array for multi electron beam system | Christopher Sears | 2021-07-06 |
| 10964522 | High resolution electron energy analyzer | Christopher Sears, Nikolai Chubun | 2021-03-30 |
| 10770258 | Method and system for edge-of-wafer inspection and review | Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye | 2020-09-08 |
| 10748739 | Deflection array apparatus for multi-electron beam system | Christopher Sears | 2020-08-18 |
| 10224177 | Method and system for aberration correction in an electron beam system | Christopher Sears, Sameet K. Shriyan | 2019-03-05 |
| 10096447 | Electron beam apparatus with high resolutions | Christopher Sears | 2018-10-09 |
| 10090131 | Method and system for aberration correction in an electron beam system | Christopher Sears | 2018-10-02 |
| 10056224 | Method and system for edge-of-wafer inspection and review | Christopher Sears, Harsh Sinha, David Trease, David Kaz, Wei Ye | 2018-08-21 |
| 9934933 | Extractor electrode for electron source | Laurence S. Hordon, Nikolai Chubun, Luca Grella, Daniel Bui, Kevin Cummings +2 more | 2018-04-03 |
| 9905391 | System and method for imaging a sample with an electron beam with a filtered energy spread | — | 2018-02-27 |
| 9881764 | Heat-spreading blanking system for high throughput electron beam apparatus | Christopher Sears, Douglas A. Larson | 2018-01-30 |
| 9443696 | Electron beam imaging with dual Wien-filter monochromator | Liqun Han | 2016-09-13 |
| 9053900 | Apparatus and methods for high-resolution electron beam imaging | Liqun Han | 2015-06-09 |
| 8921782 | Tilt-imaging scanning electron microscope | Ichiro Honjo, Christopher Sears, Liqun Han | 2014-12-30 |
| 8859982 | Dual-lens-gun electron beam apparatus and methods for high-resolution imaging with both high and low beam currents | Liqun Han | 2014-10-14 |
| 8664594 | Electron-optical system for high-speed and high-sensitivity inspections | Liqun Han, Mohammed Tahmassebpur, Salam Harb, John D. Greene | 2014-03-04 |
| 8536538 | Multiple-pole electrostatic deflector for improving throughput of focused electron beam instruments | — | 2013-09-17 |