| 12286703 |
Evaporation apparatus, vapor deposition apparatus, and evaporation method |
Stefan Bangert |
2025-04-29 |
| 12060634 |
Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller |
Stefan Bangert, Thomas DEPPISCH |
2024-08-13 |
| 11905589 |
Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate |
Andreas Lopp, Stefan Bangert |
2024-02-20 |
| 10636687 |
Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber |
Simon Lau |
2020-04-28 |
| 9873945 |
Common deposition platform, processing station, and method of operation thereof |
Neil MORRISON, Jose Manuel DIEGUEZ-CAMPO, Heike Landgraf, Tobias Stolley, Stefan Hein +1 more |
2018-01-23 |
| 8869967 |
Dynamic load lock with cellular structure for discrete substrates |
Juergen Henrich, Andreas Lopp, Susanne Schlaefer |
2014-10-28 |
| 7575662 |
Method for operating a sputter cathode with a target |
Stefan Bangert, Markus Hanika, Karl-Albert KEIM, Michael König, Jorg Krempel-Hesse +4 more |
2009-08-18 |
| 6207028 |
Sputtering device with a cathode with permanent magnet system |
Dieter Haas, Jorg Krempel-Hesse |
2001-03-27 |
| 6004109 |
Apparatus for the rapid evacuation of a vacuum chamber |
Thomas Gebele |
1999-12-21 |
| 5228838 |
Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof |
Thomas Gebele |
1993-07-20 |
| 5216742 |
Linear thermal evaporator for vacuum vapor depositing apparatus |
Thomas Krug, Friedrich Anderle, Albert Feuerstein, Eggo Sichmann |
1993-06-01 |
