| 6814825 |
Method and device for controlling thickness during spin coating |
Wolfgang Becker, Edgar Rueth, Reinhard Gerigk |
2004-11-09 |
| 6344114 |
Magnetron sputtering cathode with magnet disposed between two yoke plates |
Michael L. Muecke, Wolfgang Becker, Klaus Truckenmueller |
2002-02-05 |
| 6338781 |
Magnetron sputtering cathode with magnet disposed between two yoke plates |
Michaell Muecke |
2002-01-15 |
| 6261403 |
Method for preventing bubbles or small bubbles when connecting substrate parts of optical data carriers by means of an adhesive |
Reinhard Gerigk, Michael L. Muecke |
2001-07-17 |
| 6096180 |
Cathodic sputtering device |
— |
2000-08-01 |
| 6054029 |
Device for gripping, holdings and/or transporting substrates |
Stefan Kempf |
2000-04-25 |
| 5863328 |
Device for surface coating or lacquering of substrates |
Reinhard Gerigk |
1999-01-26 |
| 5863399 |
Device for cathode sputtering |
— |
1999-01-26 |
| 5766359 |
Device for surface coating or lacquering of substrates |
Reinhard Gerigk |
1998-06-16 |
| 5612068 |
Apparatus for the transfer of substrates |
Stefan Kempf |
1997-03-18 |
| 5403663 |
Process for coating a polycarbonate substrate with an aluminum-silicon alloy |
Thomas Krug, Jurgen Meinel, Dan Costescu |
1995-04-04 |
| 5330632 |
Apparatus for cathode sputtering |
— |
1994-07-19 |
| 5266178 |
Sputtering cathode |
— |
1993-11-30 |
| 5216742 |
Linear thermal evaporator for vacuum vapor depositing apparatus |
Thomas Krug, Friedrich Anderle, Albert Feuerstein, Wolfgang BUSCHBECK |
1993-06-01 |
| 5133850 |
Sputtering cathode for coating substrates in cathode sputtering apparatus |
Reiner Kukla, Wolf-Eckart Fritsche |
1992-07-28 |
| 5074984 |
Method for coating polymethylmethacrylate substrate with aluminum |
Thomas Krug, Wolf-Eckart Fritsche, Martin Pollmann |
1991-12-24 |
| 5068021 |
Device for coating a polymethylmethacrylate substrate with aluminum |
Wolf-Eckart Fritsche, Jim Schlussler |
1991-11-26 |
| 5006213 |
Process for coating a substrate with electrically conductive materials |
Thomas Krug, Stephan Kempf |
1991-04-09 |