| 7518732 |
Multi-axis interferometer system using independent, single axis interferometers |
Jeffrey Sullivan, Kurt Werder |
2009-04-14 |
| 7470919 |
Substrate support assembly with thermal isolating plate |
Yacov Elgar, Patrick Duane, Rushford Ogden |
2008-12-30 |
| 7345287 |
Cooling module for charged particle beam column elements |
Thomas Jasinski, Dieter Winkler |
2008-03-18 |
| 7336369 |
Multi-axis interferometer system using independent, single axis interferometers |
Jeffrey Sullivan, Kurt Werder |
2008-02-26 |
| 6219146 |
Laser reflector alignment |
Robert A. Innes |
2001-04-17 |
| 5209402 |
Laminar flow gas diffuser |
Daniel B. DeBra |
1993-05-11 |
| 4788431 |
Specimen distance measuring system |
Lee H. Veneklasen, Glen E. Howard, Donald J. McCarthy, Allen M. Carroll, Daniel L. Cavan |
1988-11-29 |
| 4412133 |
Electrostatic cassette |
Russell H. Rhoades, John W. Vorreiter, John C. Wiesner, Charles E. Shepard |
1983-10-25 |
