Issued Patents All Time
Showing 25 most recent of 99 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424408 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2025-09-23 |
| 12354833 | Multiple landing energy scanning electron microscopy systems and methods | Wei Fang, Zhong-Wei Chen | 2025-07-08 |
| 12347643 | Multiple charged-particle beam apparatus and methods of operating the same using movable lenses | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2025-07-01 |
| 12278081 | System and method for alignment of secondary beams in multi-beam inspection apparatus | Qingpo Xi, Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-04-15 |
| 12243709 | Apparatus using multiple charged particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2025-03-04 |
| 12237143 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2025-02-25 |
| 12237144 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-02-25 |
| 12211669 | Multiple charged-particle beam apparatus with low crosstalk | Zizhou GONG, Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2025-01-28 |
| 12196692 | Systems and methods for voltage contrast defect detection | Xuedong Liu, Zhong-Wei Chen, Xiaoyu JI, Xiaoxue CHEN, Weimin Zhou +1 more | 2025-01-14 |
| 12191109 | Sample pre-charging methods and apparatuses for charged particle beam inspection | Xuedong Liu, Qingpo Xi, Youfei Jiang, Xuerang Hu, Zhongwei Chen | 2025-01-07 |
| 12165830 | Multiple charged-particle beam apparatus with low crosstalk | Shichen GU, Qingpo Xi | 2024-12-10 |
| 12142455 | Charged particle beam apparatus with multiple detectors and methods for imaging | Xuedong Liu, Weimin Zhou, Xiaoxue CHEN, Xiaoyu JI, Heng Li +3 more | 2024-11-12 |
| 12142453 | Multi-beam inspection apparatus | Qian Zhang, Xuerang Hu, Xuedong Liu | 2024-11-12 |
| 12087541 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Zhongwei Chen | 2024-09-10 |
| 12080515 | Apparatus for multiple charged-particle beams | Xuedong Liu, Xuerang Hu, Zong-wei Chen | 2024-09-03 |
| 12033830 | Multiple charged-particle beam apparatus with low crosstalk | Xuerang Hu, Qingpo Xi, Xuedong Liu | 2024-07-09 |
| 11961697 | Apparatus using charged particle beams | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2024-04-16 |
| 11887807 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhongwei Chen | 2024-01-30 |
| RE49784 | Apparatus of plural charged-particle beams | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2024-01-02 |
| 11854765 | Multiple charged-particle beam apparatus and methods | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen, Martinus Gerardus Johannes Maria MAASSEN | 2023-12-26 |
| 11804356 | Apparatus using multiple beams of charged particles | Xuerang Hu, Xuedong Liu, Zhong-Wei Chen | 2023-10-31 |
| 11798777 | Charged particle beam apparatus, and systems and methods for operating the apparatus | Martinus Gerardus Johannes Maria MAASSEN, Peter Paul HEMPENIUS, Zhongwei Chen | 2023-10-24 |
| 11721521 | Multi-beam inspection apparatus with improved detection performance of signal electrons | Xuedong Liu, Xuerang Hu, Zhong-Wei Chen | 2023-08-08 |
| 11715619 | Method and apparatus for charged particle detection | Yongxin Wang, Zhonghua Dong, Zhongwei Chen | 2023-08-01 |
| 11705304 | Apparatus of plural charged-particle beams | Shuai Li, Xuedong Liu, Juying Dou, Xuerang Hu, Zhongwei Chen | 2023-07-18 |