Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305748 | Method of matching two or more plasma reactors | Gaurav Saraf, Xiawan Yang, Farid Abooameri, Anisul Khan, Bradley Scott Hersch | 2016-04-05 |
| 9184021 | Predictive method of matching two plasma reactors | Gaurav Saraf, Xiawan Yang, Farid Abooameri, Anisul Khan, Bradley Scott Hersch | 2015-11-10 |
| 7398693 | Adaptive control method for rapid thermal processing of a substrate | Joseph M. Ranish, Tarpan Dixit, Dean Jennings, Balasubramanian Ramachandran, Aaron Muir Hunter +2 more | 2008-07-15 |
| 5316278 | Clamping ring apparatus for processing semiconductor wafers | Semyon Sherstinsky, Mei Chang, Charles C. Harris, Alfred Mak, James Roberts +1 more | 1994-05-31 |