Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305748 | Method of matching two or more plasma reactors | Gaurav Saraf, Xiawan Yang, Wen Teh Chang, Anisul Khan, Bradley Scott Hersch | 2016-04-05 |
| 9184021 | Predictive method of matching two plasma reactors | Gaurav Saraf, Xiawan Yang, Wen Teh Chang, Anisul Khan, Bradley Scott Hersch | 2015-11-10 |
| 8475625 | Apparatus for etching high aspect ratio features | Sharma Pamarthy, Huutri Dao, Xiaoping Zhou, Kelly A. McDonough, Jivko Dinev +9 more | 2013-07-02 |