Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12283451 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Christopher Ramsayer, Mohan Thilagaraj | 2025-04-22 |
| 11784027 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Karl Leeser | 2023-10-10 |
| 11469084 | High temperature RF connection with integral thermal choke | Timothy Scott Thomas, Joel Hollingsworth, David French, Damien Slevin | 2022-10-11 |
| 11264207 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Karl Leeser | 2022-03-01 |
| 11189452 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Christopher Ramsayer, Mohan Thilagaraj | 2021-11-30 |
| 10636624 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Karl Leeser | 2020-04-28 |
| 10373794 | Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber | Christopher Ramsayer, Mohan Thilagaraj | 2019-08-06 |
| 10373805 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Karl Leeser | 2019-08-06 |
| 10043636 | Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal | Hyungjoon Kim, Sunil Kapoor, Karl Leeser | 2018-08-07 |
| 9111733 | Plasma ignition performance for low pressure physical vapor deposition (PVD) processes | Martin E. Freeborn | 2015-08-18 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Steve Sansoni, Vijay D. Parkhe, Eugene Tzou | 2002-05-28 |
| 6255601 | Conductive feedthrough for a ceramic body and method of fabricating same | — | 2001-07-03 |
| 6053756 | Interlock safety device | Allen Flanigan | 2000-04-25 |
| 5861086 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Steve Sansoni, Vijay D. Parkhe, Eugene Tzou | 1999-01-19 |