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Showerhead electrode assemblies for plasma processing apparatuses |
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2018-01-23 |
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Dense oxide coated component of a plasma processing chamber and method of manufacture thereof |
Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more |
2017-01-17 |
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Dense oxide coated component of a plasma processing chamber and method of manufacture thereof |
Hong Shih, Lin Xu, John Michael Kerns, William Charles, John Daugherty +3 more |
2015-09-01 |
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Film adhesive for semiconductor vacuum processing apparatus |
Dean J. Larson, Victor Wang |
2015-05-12 |
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Pressure controlled heat pipe temperature control plate |
Michael C. Kellogg, Rajinder Dhindsa |
2015-03-10 |
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Methods for stabilizing contact surfaces of electrostatic chucks |
Chris Kimball, Peter Muraoka |
2014-12-09 |
| 8701268 |
Composite showerhead electrode assembly for a plasma processing apparatus |
Dean J. Larson, Victor Wang |
2014-04-22 |
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Showerhead electrode assemblies for plasma processing apparatuses |
Rajinder Dhindsa |
2014-03-25 |
| 8529729 |
Plasma processing chamber component having adaptive thermal conductor |
Michael Dickens |
2013-09-10 |
| 8449786 |
Film adhesive for semiconductor vacuum processing apparatus |
Dean J. Larson, Victor Wang |
2013-05-28 |
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Composite showerhead electrode assembly for a plasma processing apparatus |
Dean J. Larson, Victor Wang |
2013-04-16 |
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Process for making sodium bicarbonate from Nahcolite-rich solutions |
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1996-12-31 |
