Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339583 | Optimization using a non-uniform illumination intensity profile | Janardan Nath, Christopher Mason, Duan-Fu Stephen Hsu, Tian Gang | 2025-06-24 |
| 11656555 | Lithographic apparatus and illumination uniformity correction system | Janardan Nath, Kalyan Kumar MANKALA, Joseph H. Lyons, Ozer Unluhisarcikli, Alexander Harris Ledbetter +2 more | 2023-05-23 |
| 8629973 | Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation | Richard Carl Zimmerman, Hendrikus Robertus Marie Van Greevenbroek, Peter Kochersperger, Elizabeth Stone, Szilard Istvan Csiszar +2 more | 2014-01-14 |
| 7821625 | Systems and methods for lithographic illuminator beam deviation measurement and calibration using grating sensors | — | 2010-10-26 |
| 7630080 | Refractive index sensor utilizing gold island surface plasmon resonance on optical fiber | — | 2009-12-08 |
| 7426034 | Refractive index sensor utilizing gold island surface plasmon resonance on optical fiber | — | 2008-09-16 |
| 7253888 | Refractive index sensor utilizing gold island surface plasmon resonance on optical fiber | — | 2007-08-07 |