Issued Patents All Time
Showing 25 most recent of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8778774 | Enhancement of properties of thin film ferroelectric materials | Toshikazu Nishida, Antonio Guillermo Acosta, John Anthony Rodriguez | 2014-07-15 |
| 8723241 | MEMS device fabricated with integrated circuit | Kezhakkedath R. Udayakumar, Marie Denison | 2014-05-13 |
| 8093070 | Method for leakage reduction in fabrication of high-density FRAM arrays | Francis G. Celii, Kezhakkedath R. Udayakumar, Gregory B. Shinn, Scott R. Summerfelt | 2012-01-10 |
| 7985603 | Ferroelectric capacitor manufacturing process | Francis G. Celii, Robert J. Kraft, Kezhakkedath R. Udayakumar, Scott R. Summerfelt | 2011-07-26 |
| 7935543 | Method of forming PZT ferroelectric capacitors for integrated circuits | Scott R. Summerfelt, Kezhakkedath R. Udayakumar | 2011-05-03 |
| 7723199 | Method for cleaning post-etch noble metal residues | Yaw S. Obeng, Kezhakkedath R. Udayakumar, Scott R. Summerfelt, Sanjeev Aggarwal, Francis G. Celii +2 more | 2010-05-25 |
| 7514734 | Hardmask for forming ferroelectric capacitors in a semiconductor device and methods for fabricating the same | Sanjeev Aggarwal, Kelly Taylor | 2009-04-07 |
| 7361599 | Integrated circuit and method | Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert, Francis G. Celii +2 more | 2008-04-22 |
| 7220600 | Ferroelectric capacitor stack etch cleaning methods | Scott R. Summerfelt, Lindsey Hall, Kezhakkedath R. Udayakumar | 2007-05-22 |
| 7183602 | Ferroelectric capacitor hydrogen barriers and methods for fabricating the same | K. Udayakumar, Scott R. Summerfelt | 2007-02-27 |
| 7019352 | Low silicon-hydrogen sin layer to inhibit hydrogen related degradation in semiconductor devices having ferroelectric components | K. Udayakumar, Martin G. Albrecht, Scott R. Summerfelt, Sarah Hartwig | 2006-03-28 |
| 7001821 | Method of forming and using a hardmask for forming ferroelectric capacitors in a semiconductor device | Sanjeev Aggarwal, Kelly Taylor | 2006-02-21 |
| 6984857 | Hydrogen barrier for protecting ferroelectric capacitors in a semiconductor device and methods for fabricating the same | K. Udayakumar, Martin G. Albrecht, Scott R. Summerfelt, Sanjeev Aggarwal, Jeff L. Large | 2006-01-10 |
| 6982448 | Ferroelectric capacitor hydrogen barriers and methods for fabricating the same | K. Udayakumar, Scott R. Summerfelt | 2006-01-03 |
| 6902939 | Integrated circuit and method | Guoqiang Xing, Mark Visokay, Justin Gaynor, Stephen Roy Gilbert, Francis G. Celii +2 more | 2005-06-07 |
| 6876021 | Use of amorphous aluminum oxide on a capacitor sidewall for use as a hydrogen barrier | J. Scott Martin, Scott R. Summerfelt, Kelly Taylor, Luigi Colombo, Sanjeev Aggarwal +3 more | 2005-04-05 |
| 6841396 | VIA0 etch process for FRAM integration | Francis G. Celii, K. Udayakumar, Scott R. Summerfelt | 2005-01-11 |
| 6828161 | Method of forming an FeRAM having a multi-layer hard mask and patterning thereof | Scott R. Summerfelt, Sanjeev Aggarwal, Luigi Colombo, J. Scott Martin | 2004-12-07 |
| 6819601 | Programmable reference for 1T/1C ferroelectric memories | Jarrod Eliason, Bill Kraus, Hugh P. McAdams, Scott R. Summerfelt | 2004-11-16 |
| 6773930 | Method of forming an FeRAM capacitor having a bottom electrode diffusion barrier | Scott R. Summerfelt, Sanjeev Aggarwal, Tomojuki Sakoda, Chiu Chi | 2004-08-10 |
| 6686210 | Methods for controlling the crystallographic texture of thin films with anisotropic ferroelectric polarization or permittivity | Stephen Roy Gilbert, Scott R. Summerfelt | 2004-02-03 |
| 6660612 | Design to prevent tungsten oxidation at contact alignment in FeRAM | Yung Shan Chang, Scott R. Summerfelt | 2003-12-09 |
| 6635498 | Method of patterning a FeRAM capacitor with a sidewall during bottom electrode etch | Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo, Sanjeev Aggarwal | 2003-10-21 |
| 6548343 | Method of fabricating a ferroelectric memory cell | Scott R. Summerfelt, Guoqiang Xing, Luigi Colombo, Tomoyuki Sakoda, Stephen Roy Gilbert +5 more | 2003-04-15 |
| 6534348 | Ultrascaled MIS transistors fabricated using silicon-on-lattice-matched insulator approach | Glen Wilk | 2003-03-18 |