Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481488 | Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method | Toshihiko Orihara, Takahito Nishimura | 2019-11-19 |
| 10310373 | Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask | Takahito Nishimura | 2019-06-04 |
| 9104112 | Mask blank, method of manufacturing the same, and transfer mask | Kazuya Sakai, Masahiro Hashimoto | 2015-08-11 |
| 8802334 | Surface treatment method for a mask blank, method of manufacturing a mask blank, and method of manufacturing a mask | Toshiyuki Suzuki, Masahiro Hashimoto, Yasunori Yokoya | 2014-08-12 |
| 8748062 | Method of cleaning substrate | Kazuto Yamauchi, Tsutomu Shoki | 2014-06-10 |
| 8697315 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Atsushi Kominato, Hiroyuki Iwashita, Masahiro Hashimoto, Yasushi Okubo | 2014-04-15 |
| 8114556 | Photomask blank and production method thereof, and photomask production method, and semiconductor device production method | Atsushi Kominato, Hiroyuki Iwashita, Masahiro Hashimoto, Yasushi Okubo | 2012-02-14 |
| 8081384 | Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask | Morio Hosoya, Akira Ikeda | 2011-12-20 |
| 7901842 | Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device | Yasushi Okubo, Masao Ushida, Hiroyuki Iwashita | 2011-03-08 |
| 7804648 | Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask | Morio Hosoya, Akira Ikeda | 2010-09-28 |