Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901842 | Photomask blank and method of producing the same, method of producing photomask, and method of producing semiconductor device | Takeyuki Yamada, Yasushi Okubo, Hiroyuki Iwashita | 2011-03-08 |
| 7781125 | Lithography mask blank | Megumi Takeuchi, Osamu Suzuki, Minoru Sakamoto | 2010-08-24 |
| 7611808 | Halftone type phase shift mask blank and halftone type phase shift mask | Minoru Sakamoto, Naoki Nishida | 2009-11-03 |
| D568839 | Photomask blank | Masaru Mitsui, Shigekazu Matsui, Osamu Nagarekawa | 2008-05-13 |
| D543160 | Photomask blank | Masaru Mitsui, Shigekazu Matsui, Osamu Nagarekawa | 2007-05-22 |
| 7217481 | Photomask blank, photomask, methods of manufacturing the same and methods of forming micropattern | Masaru Mitsui, Haruhiko Yamagata | 2007-05-15 |
| 7166392 | Halftone type phase shift mask blank and halftone type phase shift mask | Minoru Sakamoto, Naoki Nishida | 2007-01-23 |
| 6899979 | Photomask blank, photomask, methods of manufacturing the same, and method of forming micropattern | Masaru Mitsui, Haruhiko Yamagata | 2005-05-31 |
| 4696877 | Photo-mask blank comprising a shading layer having a variable etch rate | Shigekazu Matsui, Kenichi Kagaya, Kouichi Maruyama | 1987-09-29 |
| 4563407 | Photo-mask blank comprising a shading layer having a variable etch rate | Shigekazu Matsui, Kenichi Kagaya, Kouichi Maruyama | 1986-01-07 |