| 12198951 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more |
2025-01-14 |
| 11948828 |
Pin-less substrate transfer apparatus and method for a processing chamber |
Srinivas D. Nemani, Adib Khan, Qiwei Liang |
2024-04-02 |
| 11749555 |
Semiconductor processing system |
Srinivas D. Nemani, Qiwei Liang, Adib Khan |
2023-09-05 |
| 11361978 |
Gas delivery module |
Adib Khan, Qiwei Liang, Srinivas D. Nemani |
2022-06-14 |
| D941787 |
Substrate transfer blade |
Srinivas D. Nemani, Adib Khan, Qiwei Liang |
2022-01-25 |
| 11110383 |
Gas abatement apparatus |
Adib Khan, Qiwei Liang, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more |
2021-09-07 |
| 10748783 |
Gas delivery module |
Adib Khan, Qiwei Liang, Srinivas D. Nemani |
2020-08-18 |
| 10704141 |
In-situ CVD and ALD coating of chamber to control metal contamination |
Srinivas D. Nemani, Qiwei Liang, Adib Khan, Maximillian Clemons |
2020-07-07 |
| 10675581 |
Gas abatement apparatus |
Adib Khan, Qiwei Liang, Srinivas D. Nemani, Rafika Smati, Joseph Ng +1 more |
2020-06-09 |
| 10529603 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more |
2020-01-07 |
| 10468285 |
High temperature chuck for plasma processing systems |
Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more |
2019-11-05 |
| 10224224 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Srinivas D. Nemani, Adib Khan, Venkata Ravishankar Kasibhotla, Sean S. Kang +1 more |
2019-03-05 |
| 10179941 |
Gas delivery system for high pressure processing chamber |
Adib Khan, Qiwei Liang, Keith Tatseun Wong, Srinivas D. Nemani |
2019-01-15 |
| 9728437 |
High temperature chuck for plasma processing systems |
Toan Q. Tran, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more |
2017-08-08 |
