| 7241372 |
Plating apparatus and plating liquid removing method |
Kenya Tomioka, Katsumi Tsuda |
2007-07-10 |
| 7166204 |
Plating apparatus and method |
Kenya Tomioka, Katsumi Tsuda, Masayuki Kumekawa, Koji Mishima |
2007-01-23 |
| 7033463 |
Substrate plating method and apparatus |
Akihisa Hongo, Naoaki Ogure, Hiroaki Inoue, Tetsuma Ikegami, Koji Mishima +4 more |
2006-04-25 |
| 6793794 |
Substrate plating apparatus and method |
Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Junitsu Yamakawa, Mizuki Nagai +3 more |
2004-09-21 |
| 6689216 |
Plating apparatus and plating liquid removing method |
Kenya Tomioka, Katsumi Tsuda |
2004-02-10 |
| 6660139 |
Plating apparatus and method |
Kenya Tomioka, Katsumi Tsuda, Naomitsu Ozawa |
2003-12-09 |
| 6558518 |
Method and apparatus for plating substrate and plating facility |
Akihisa Hongo, Kenya Tomioka, Katsumi Tsuda, Masayuki Kumekawa, Naoaki Ogure +1 more |
2003-05-06 |
| 6517689 |
Plating device |
Akihisa Hongo, Kenichi Suzuki, Atsushi Chono, Mitsuo Tada, Akira Ogata +1 more |
2003-02-11 |
| 6500317 |
Plating apparatus for detecting the conductivity between plating contacts on a substrate |
Junichiro Yoshioka, Atsushi Chono, Mitsuo Tada, Akihisa Hongo, Yoshitaka Mukaiyama +4 more |
2002-12-31 |
| 6365017 |
Substrate plating device |
Akihisa Hongo, Naoaki Ogure, Hiroyuki Ueyama, Junitsu Yamakawa, Mizuki Nagai +3 more |
2002-04-02 |
| 6365020 |
Wafer plating jig |
Junichiro Yoshioka, Kenya Tomioka, Atsushi Chono, Naomitsu Ozawa |
2002-04-02 |