Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10151987 | Measuring method, apparatus and substrate | David Deckers, Franciscus Godefridus Casper Bijnen | 2018-12-11 |
| 9746785 | Sub-wavelength segmentation in measurement targets on substrates | Maurits Van Der Schaar, Marcus Adrianus Van De Kerkhof | 2017-08-29 |
| 9280057 | Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus | Franciscus Godefridus Casper Bijnen, David Deckers | 2016-03-08 |
| 9046385 | Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus | Franciscus Godefridus Casper Bijnen, David Deckers | 2015-06-02 |
| 8319967 | Marker structure and method of forming the same | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing, Patrick Warnaar, Maya Angelova Doytcheva | 2012-11-27 |
| 8243259 | Lithographic apparatus | Vitally Prosyentsov, Sanjaysingh Lalbahadoersing, Hyun Woo Lee | 2012-08-14 |
| 8203692 | Sub-segmented alignment mark arrangement | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing | 2012-06-19 |
| 8072615 | Alignment method, alignment system, and product with alignment mark | Richard Johannes Franciscus Van Haren, Sanjaysingh Lalbahadoersing, Xiuhong Wei | 2011-12-06 |
| 7944063 | Application of 2-dimensional photonic crystals in alignment devices | Richard Johannes Franciscus Van Haren | 2011-05-17 |
| 7863763 | Binary sinusoidal sub-wavelength gratings as alignment marks | Richard Johannes Franciscus Van Haren | 2011-01-04 |
| 7737566 | Alignment devices and methods for providing phase depth control | Richard Johannes Franciscus Van Haren | 2010-06-15 |
| 7598024 | Method and system for enhanced lithographic alignment | Sanjaysingh Lalbahadoersing | 2009-10-06 |
| 7545520 | System and method for CD determination using an alignment sensor of a lithographic apparatus | Hyun Woo Lee | 2009-06-09 |
| 7460231 | Alignment tool for a lithographic apparatus | Richard Johannes Franciscus Van Haren, Maurits Van Der Schaar | 2008-12-02 |