| 6821900 |
Method for dry etching deep trenches in a substrate |
Rajiv Ranade, Munir D. Naeem, Gangadhara S. Mathad |
2004-11-23 |
| 6670233 |
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor |
Greg Costrini |
2003-12-30 |
| 6559001 |
Methods of patterning a multi-layer film stack and forming a lower electrode of a capacitor |
Greg Costrini |
2003-05-06 |
| 6548414 |
Method of plasma etching thin films of difficult to dry etch materials |
Martin Gutsche |
2003-04-15 |
| 6518118 |
Structure and process for buried bitline and single sided buried conductor formation |
Ramachandra Divakaruni, Jack A. Mandelman |
2003-02-11 |
| 6420272 |
Method for removal of hard mask used to define noble metal electrode |
Hua Shen, David E. Kotecki, Jenny Lian, Gerhard Kunkel, Nimal Chaudhary |
2002-07-16 |
| 6420099 |
Tungsten hard mask for dry etching aluminum-containing layers |
Martin Gutsche |
2002-07-16 |
| 6406925 |
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
Leslie G. Jerde, John A. Meyer |
2002-06-18 |
| 6365328 |
Semiconductor structure and manufacturing method |
Hua Shen, David E. Kotecki, Jenny Lian, Laertis Economikos, Fen F. Jamin +2 more |
2002-04-02 |
| 6348374 |
Process for 4F2 STC cell having vertical MOSFET and buried-bitline conductor structure |
Gary B. Bronner, Ramachandra Divakaruni, Ulrike Gruening, Jack A. Mandelman, Carl Radens |
2002-02-19 |
| 6346428 |
Method and apparatus for minimizing semiconductor wafer arcing during semiconductor wafer processing |
Leslie G. Jerde, John A. Meyer |
2002-02-12 |
| 6261967 |
Easy to remove hard mask layer for semiconductor device fabrication |
Hua Shen, David E. Kotecki, Jenny Lian |
2001-07-17 |
| 6214661 |
Method to prevent oxygen out-diffusion from BSTO containing micro-electronic device |
Heon Jeong LEE, Young Jin Park, Young Limb, Brian Lee, Kilho Lee +1 more |
2001-04-10 |
| 6207584 |
High dielectric constant material deposition to achieve high capacitance |
Hua Shen, David E. Kotecki, Robert Benjamin Laibowitz, Katherine L. Saenger, Jenny Lian +3 more |
2001-03-27 |
