Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9644267 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2017-05-09 |
| 8481118 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2013-07-09 |
| 7976631 | Multi-gas straight channel showerhead | Brian H. Burrows, Alexander Tam, Kenric Choi, James D. Felsch, Jacob Grayson +4 more | 2011-07-12 |
| 7781016 | Method for measuring precursor amounts in bubbler sources | Brendan McDougall, Jacob Smith, Garry K. Kwong, Sandeep Nijhawan, Lori D. Washington | 2010-08-24 |
| 7674352 | System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus | David P. Bour, Lori D. Washington, Sandeep Nijhawan, Jacob Smith, Alexander Tam +5 more | 2010-03-09 |