Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7087143 | Plating system for semiconductor materials | Wayne J. Schmidt, Daniel J. Woodruff | 2006-08-08 |
| 7074246 | Modular semiconductor workpiece processing tool | Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2006-07-11 |
| 6960257 | Semiconductor processing system with wafer container docking and loading station | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl Byle | 2005-11-01 |
| 6843894 | Cathode current control system for a wafer electroplating apparatus | Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu | 2005-01-18 |
| 6833035 | Semiconductor processing system with wafer container docking and loading station | Raymond F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright | 2004-12-21 |
| 6805778 | Contact assembly for supplying power to workpieces during electrochemical processing | Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer | 2004-10-19 |
| 6627051 | Cathode current control system for a wafer electroplating apparatus | Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu | 2003-09-30 |
| 6461494 | Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot | Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer | 2002-10-08 |
| 6454926 | Semiconductor plating system workpiece support having workpiece-engaging electrode with submerged conductive current transfer areas | Thomas Ritzdorf, Jeffrey I. Turner | 2002-09-24 |
| 6440178 | Modular semiconductor workpiece processing tool | Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2002-08-27 |
| 6322674 | Cathode current control system for a wafer electroplating apparatus | Joseph J. Fatula, Jr., Robert Hitzfeld, Richard J. Contreras, Andrew Chiu | 2001-11-27 |
| 6319841 | Semiconductor processing using vapor mixtures | Eric J. Bergman, David Oberlitner | 2001-11-20 |
| 6203582 | Modular semiconductor workpiece processing tool | Daniel J. Woodruff, Wayne J. Schmidt, Kevin W. Coyle, Vladimir Zila, Worm Lund | 2001-03-20 |
| 6162734 | Semiconductor processing using vapor mixtures | Eric J. Bergman, David Oberlitner | 2000-12-19 |
| 6139703 | Cathode current control system for a wafer electroplating apparatus | Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, James Doolittle | 2000-10-31 |
| 6120641 | Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece | E. Henry Stevens | 2000-09-19 |
| 6014817 | Semiconductor wafer processing system | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright | 2000-01-18 |
| 6004440 | Cathode current control system for a wafer electroplating apparatus | Kyle M. Hanson, K. Chris Haugan, Kevin W. Coyle, James Doolittle | 1999-12-21 |
| 6001234 | Methods for plating semiconductor workpieces using a workpiece-engaging electrode assembly with sealing boot | Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer | 1999-12-14 |
| 5996241 | Semiconductor wafer processing system with immersion module | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright | 1999-12-07 |
| 5954911 | Semiconductor processing using vapor mixtures | Eric J. Bergman, David Oberlitner | 1999-09-21 |
| 5882168 | Semiconductor processing systems | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright | 1999-03-16 |
| 5836736 | Semiconductor processing system with wafer container docking and loading station | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl Byle | 1998-11-17 |
| 5788454 | Semiconductor wafer processing system | Raymon F. Thompson, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright | 1998-08-04 |
| 5784797 | Carrierless centrifugal semiconductor processing system | Gary L. Curtis, Raymon F. Thompson, Ed Fix | 1998-07-28 |