| 12193138 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Yuhou Wang, Alex Paterson |
2025-01-07 |
| 11716805 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Yuhou Wang, Alex Paterson |
2023-08-01 |
| 11224116 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Yuhou Wang, Alex Paterson |
2022-01-11 |
| 10638593 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Yuhou Wang, Alex Paterson |
2020-04-28 |
| 10264663 |
Matchless plasma source for semiconductor wafer fabrication |
Maolin Long, Yuhou Wang, Alex Paterson |
2019-04-16 |
| 10056231 |
TCCT match circuit for plasma etch chambers |
Maolin Long, Alex Paterson |
2018-08-21 |
| 9978565 |
Systems for cooling RF heated chamber components |
Jon McChesney, Saravanapriyan Sriraman, Alex Paterson, John Holland |
2018-05-22 |
| 9293353 |
Faraday shield having plasma density decoupling structure between TCP coil zones |
Maolin Long, Alex Paterson, Ying Wu, John Drewery |
2016-03-22 |
| 9059678 |
TCCT match circuit for plasma etch chambers |
Maolin Long, Alex Paterson |
2015-06-16 |
| 6553853 |
Plasma probe and method for making same |
Stanley C. Siu |
2003-04-29 |
| 6357308 |
Plasma probe and method for making same |
Stanley C. Siu |
2002-03-19 |
| 5933314 |
Method and an apparatus for offsetting plasma bias voltage in bi-polar electro-static chucks |
Albert M. Lambson, Rick Caple, Eric H. Lenz, Laura M. Braun |
1999-08-03 |
| D405443 |
Aircraft personal video monitor |
— |
1999-02-09 |
