Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183597 | Fluid delivery system | Stephen Carson, Michael Vogtmann | 2024-12-31 |
| 12062553 | Method of manufacturing semiconductors using fluid delivery system | Chris Melcer, Phillip Ryan Barros, Haruyuki KUBOTA, Todd Cushman | 2024-08-13 |
| 11990354 | Method of manufacturing semiconductors using fluid delivery system | Chris Melcer, Phillip Ryan Barros, Haruyuki KUBOTA, Todd Cushman | 2024-05-21 |
| 11698134 | Seal retainer for a component assembly and method of installing a component into an apparatus for controlling flow | Stephen Carson | 2023-07-11 |
| 11158521 | Liquid delivery system | Chris Melcer, Phillip Ryan Barros, Haruyuki KUBOTA, Todd Cushman | 2021-10-26 |
| 11158522 | Fluid delivery system | Chris Melcer, Philip Ryan Barros, Haruyuki KUBOTA, Todd Cushman | 2021-10-26 |
| 7494550 | Fluid delivery ring and methods for making and implementing the same | Stephen M. Smith | 2009-02-24 |
| 7170190 | Apparatus for oscillating a head and methods for implementing the same | John M. Boyd, Tom Anderson, John M. de Larios | 2007-01-30 |
| 7087122 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Stephen M. Smith | 2006-08-08 |
| 7040332 | Method and apparatus for megasonic cleaning with reflected acoustic waves | John M. Boyd, Fred C. Redeker, William Thie | 2006-05-09 |
| 7040017 | Methods for making and implementing fluid delivery ring | Stephen M. Smith | 2006-05-09 |
| 7029539 | Angular spin, rinse, and dry module and methods for making and implementing the same | — | 2006-04-18 |
| 6866051 | Megasonic substrate processing module | Afshin Nickhou, Michael Ravkin | 2005-03-15 |
| 6848194 | Apparatus for monitoring a semiconductor wafer during a spin drying operation | — | 2005-02-01 |
| 6827092 | Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same | Stephen M. Smith | 2004-12-07 |
| 6748961 | Angular spin, rinse, and dry module and methods for making and implementing the same | — | 2004-06-15 |
| 6578853 | Chuck assembly for use in a spin, rinse, and dry module and methods for making and implementing the same | Stephen M. Smith | 2003-06-17 |
| 6558964 | Method and apparatus for monitoring a semiconductor wafer during a spin drying operation | — | 2003-05-06 |
| 6488568 | Optical view port for chemical mechanical planarization endpoint detection | John M. Boyd, Stephan Wolf | 2002-12-03 |
| 6481447 | Fluid delivery ring and methods for making and implementing the same | Stephen M. Smith | 2002-11-19 |
| 6146242 | Optical view port for chemical mechanical planarization endpoint detection | John M. Boyd, Stephan Wolf | 2000-11-14 |