Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6507029 | Sample processing apparatus and method for removing charge on sample through light irradiation | Akira Shimase, Junzou Azuma, Asahiro Kuni, Hiroya Koshishiba | 2003-01-14 |
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Akira Shimase, Junzou Azuma, Yuichi Hamamura, Michinobu Mizumura, Yasuhiro Koizumi +1 more | 2002-11-05 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Akira Shimase, Masahiro Watanabe, Asahiro Kuni, Taku Ninomiya, Hiroshi Miyai | 2002-10-15 |
| 6303932 | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Yuichi Hamamura, Akira Shimase, Junzou Azuma, Michinobu Mizumura, Yasuhiro Koizumi +1 more | 2001-10-16 |