Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9824850 | Deceleration apparatus for ribbon and spot beams | Zhimin Wan, Erik Collart | 2017-11-21 |
| 9711318 | Ribbon beam ion source of arbitrary length | — | 2017-07-18 |
| 9697988 | Ion implantation system and process | Zhimin Wan, Kourosh Saadatmand | 2017-07-04 |
| 9281162 | Single bend energy filter for controlling deflection of charged particle beam | Kourosh Saadatmand | 2016-03-08 |
| 8941077 | Deceleration apparatus for ribbon and spot beams | Zhimin Wan, Erik Collart | 2015-01-27 |
| 8921802 | Mass analyzer apparatus and systems operative for focusing ribbon ion beams and for separating desired ion species from unwanted ion species in ribbon ion beams | — | 2014-12-30 |
| 8035087 | Open-ended electromagnetic corrector assembly and method for deflecting, focusing, and controlling the uniformity of a traveling ion beam | — | 2011-10-11 |
| 7902527 | Apparatus and methods for ion beam implantation using ribbon and spot beams | Jiong Chen | 2011-03-08 |
| 7740247 | Compound sliding seal unit suitable for atmosphere to vacuum applications | Richard F. McRay | 2010-06-22 |
| 7462843 | Apparatus and methods for ion beam implantation | Jiong Chen | 2008-12-09 |
| 7326941 | Apparatus and methods for ion beam implantation using ribbon and spot beams | Jiong Chen | 2008-02-05 |
| 7112789 | High aspect ratio, high mass resolution analyzer magnet and system for ribbon ion beams | Jiong Chen | 2006-09-26 |
| 7105839 | Method and fine-control collimator for accurate collimation and precise parallel alignment of scanned ion beams | — | 2006-09-12 |
| 7078713 | Electromagnetic regulator assembly for adjusting and controlling the current uniformity of continuous ion beams | — | 2006-07-18 |
| 7059817 | Wafer handling apparatus and method | Manny Sieradzki | 2006-06-13 |
| 7057192 | Radial scan arm and collimator for serial processing of semiconductor wafers with ribbon beams | Robert Kaim | 2006-06-06 |
| 6998625 | Ion implanter having two-stage deceleration beamline | Charles M. McKenna, Douglas Brown, Edward W. Bell, Svetlana B. Radovanov | 2006-02-14 |
| 6696688 | Apparatus for magnetically scanning and/or switching a charged-particle beam | Edward H. Bell, Philip C. Harvey | 2004-02-24 |
| 6521895 | Wide dynamic range ion beam scanners | Steven R. Walther | 2003-02-18 |
| 5834786 | High current ribbon beam ion implanter | Manny Sieradzki | 1998-11-10 |
| 5822172 | Apparatus and method for temperature control of workpieces in vacuum | — | 1998-10-13 |
| 5350926 | Compact high current broad beam ion implanter | Manny Sieradzki, Anthony Renau | 1994-09-27 |
| 5126575 | Method and apparatus for broad beam ion implantation | — | 1992-06-30 |
| 4980556 | Apparatus for generating high currents of negative ions | John P. O'Connor | 1990-12-25 |