Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270896 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2022-03-08 |
| 10388546 | Apparatus for UV flowable dielectric | Jonathan D. Mohn, Patrick A. Van Cleemput, David Fang Wei Chen, Wenbo Liang, Shawn M. Hamilton | 2019-08-20 |
| 9916977 | Low k dielectric deposition via UV driven photopolymerization | Patrick A. Van Cleemput, Jonathan D. Mohn | 2018-03-13 |
| 9847222 | Treatment for flowable dielectric deposition on substrate surfaces | Patrick Reilly, Harald te Nijenhuis, Nerissa Draeger, Bart J. van Schravendijk | 2017-12-19 |
| 9245739 | Low-K oxide deposition by hydrolysis and condensation | Krishna Nittala, Derek Wong, George Andrew Antonelli, Nerissa Draeger, Patrick A. Van Cleemput | 2016-01-26 |