NC

Neil K. Colvin

AT Axcelis Technologies: 32 patents #3 of 300Top 1%
Overall (All Time): #111,831 of 4,157,543Top 3%
32
Patents All Time

Issued Patents All Time

Showing 25 most recent of 32 patents

Patent #TitleCo-InventorsDate
12154763 Hydraulic feed system for an ion source Neil J. Bassom, Joshua Abeshaus, David Sporleder, Joseph Valinski, Michael Cristoforo +2 more 2024-11-26
12051561 Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam Neil J. Bassom, Edward Moore 2024-07-30
11756772 System and method for extending a lifetime of an ion source for molecular carbon implants David Sporleder, Neil J. Bassom, Mike Ameen, Xiao Ping Xu 2023-09-12
11728140 Hydraulic feed system for an ion source Neil J. Bassom, Joshua Abeshaus, David Sporleder, Joseph Valinski, Michael Cristoforo +2 more 2023-08-15
11699563 Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam Neil J. Bassom, Xiao Ping Xu 2023-07-11
11699565 Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam Neil J. Bassom, Edward Moore 2023-07-11
11521821 Ion source repeller Steven T. Drummond, Paul Silverstein 2022-12-06
11276543 Hydrogen generator for an ion implanter Tseh-Jen Hsieh, Richard J. Rzeszut, Wendy Colby 2022-03-15
11170967 Liquid metal ion source Neil J. Bassom, Tseh-Jen Hsieh, Michael S. Ameen 2021-11-09
11062873 Hydrogen bleed gas for an ion source housing Tseh-Jen Hsieh 2021-07-13
10847339 Hydrogen generator for an ion implanter Tseh-Jen Hsieh, Richard J. Rzeszut, Wendy Colby 2020-11-24
10676370 Hydrogen co-gas when using aluminum iodide as an ion source material Tseh-Jen Hsieh, Neil Basson 2020-06-09
10679818 Low conductance self-shielding insulator for ion implantation systems John F. Baggett 2020-06-09
10535498 Lanthanated tungsten ion source and beamline components Tseh-Jen Hsieh, Paul Silverstein 2020-01-14
10361081 Phosphine co-gas for carbon implants Tseh-Jen Hsieh 2019-07-23
10361069 Ion source repeller shield comprising a labyrinth seal Tseh-Jen Hsieh, Paul Silverstein 2019-07-23
10256069 Phosphorous trifluoride co-gas for carbon implants Tseh-Jen Hsieh 2019-04-09
10170286 In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source Tseh-Jen Hsieh 2019-01-01
10087520 Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Richard J. Rzeszut, Fernando M. Silva 2018-10-02
10074508 Low conductance self-shielding insulator for ion implantation systems John F. Baggett 2018-09-11
9984855 Implementation of co-gases for germanium and boron ion implants Tseh-Jen Hsieh 2018-05-29
9978555 Ion source liner having a lip for ion implantation systems Tseh-Jen Hsieh 2018-05-22
9941087 Ion source cathode shield Tseh-Jen Hsieh, Paul Silverstein 2018-04-10
9870893 Multi-piece electrode aperture Tseh-Jen Hsieh, Paul Silverstein 2018-01-16
9805912 Hydrogen COGas for carbon implant Tseh-Jen Hsieh 2017-10-31