Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154763 | Hydraulic feed system for an ion source | Neil J. Bassom, Joshua Abeshaus, David Sporleder, Joseph Valinski, Michael Cristoforo +2 more | 2024-11-26 |
| 12051561 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil J. Bassom, Edward Moore | 2024-07-30 |
| 11756772 | System and method for extending a lifetime of an ion source for molecular carbon implants | David Sporleder, Neil J. Bassom, Mike Ameen, Xiao Ping Xu | 2023-09-12 |
| 11728140 | Hydraulic feed system for an ion source | Neil J. Bassom, Joshua Abeshaus, David Sporleder, Joseph Valinski, Michael Cristoforo +2 more | 2023-08-15 |
| 11699563 | Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam | Neil J. Bassom, Xiao Ping Xu | 2023-07-11 |
| 11699565 | Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam | Neil J. Bassom, Edward Moore | 2023-07-11 |
| 11521821 | Ion source repeller | Steven T. Drummond, Paul Silverstein | 2022-12-06 |
| 11276543 | Hydrogen generator for an ion implanter | Tseh-Jen Hsieh, Richard J. Rzeszut, Wendy Colby | 2022-03-15 |
| 11170967 | Liquid metal ion source | Neil J. Bassom, Tseh-Jen Hsieh, Michael S. Ameen | 2021-11-09 |
| 11062873 | Hydrogen bleed gas for an ion source housing | Tseh-Jen Hsieh | 2021-07-13 |
| 10847339 | Hydrogen generator for an ion implanter | Tseh-Jen Hsieh, Richard J. Rzeszut, Wendy Colby | 2020-11-24 |
| 10676370 | Hydrogen co-gas when using aluminum iodide as an ion source material | Tseh-Jen Hsieh, Neil Basson | 2020-06-09 |
| 10679818 | Low conductance self-shielding insulator for ion implantation systems | John F. Baggett | 2020-06-09 |
| 10535498 | Lanthanated tungsten ion source and beamline components | Tseh-Jen Hsieh, Paul Silverstein | 2020-01-14 |
| 10361081 | Phosphine co-gas for carbon implants | Tseh-Jen Hsieh | 2019-07-23 |
| 10361069 | Ion source repeller shield comprising a labyrinth seal | Tseh-Jen Hsieh, Paul Silverstein | 2019-07-23 |
| 10256069 | Phosphorous trifluoride co-gas for carbon implants | Tseh-Jen Hsieh | 2019-04-09 |
| 10170286 | In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source | Tseh-Jen Hsieh | 2019-01-01 |
| 10087520 | Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Dennis Elliott Kamenitsa, Richard J. Rzeszut, Fernando M. Silva | 2018-10-02 |
| 10074508 | Low conductance self-shielding insulator for ion implantation systems | John F. Baggett | 2018-09-11 |
| 9984855 | Implementation of co-gases for germanium and boron ion implants | Tseh-Jen Hsieh | 2018-05-29 |
| 9978555 | Ion source liner having a lip for ion implantation systems | Tseh-Jen Hsieh | 2018-05-22 |
| 9941087 | Ion source cathode shield | Tseh-Jen Hsieh, Paul Silverstein | 2018-04-10 |
| 9870893 | Multi-piece electrode aperture | Tseh-Jen Hsieh, Paul Silverstein | 2018-01-16 |
| 9805912 | Hydrogen COGas for carbon implant | Tseh-Jen Hsieh | 2017-10-31 |