Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198945 | Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures | Bhaskar BANDARAPU, David Mui, Karl-Heinz Hohenwarter, Butch Berney, Christian Putzi +4 more | 2025-01-14 |
| 11823892 | Gas mixture including hydrogen fluoride, alcohol and an additive for preventing stiction of and/or repairing high aspect ratio structures | Ji Zhu, Gerome Michel Dominique Melaet, Rafal Dylewicz, David Mui | 2023-11-21 |
| 11195730 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro +4 more | 2021-12-07 |
| 10490426 | Method and apparatus for processing wafer-shaped articles | Rainer Obweger, Andreas Gleissner, Thomas Wirnsberger, Franz Kumnig, Alessandro Baldaro +4 more | 2019-11-26 |