Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10571407 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Robert M. Danen, David W. Shortt | 2020-02-25 |
| 10317347 | Determining information for defects on wafers | Stefano Palomba, Pavel Kolchin, Robert M. Danen, David W. Shortt | 2019-06-11 |
| 10215713 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2019-02-26 |
| 9989479 | System and method to determine depth for optical wafer inspection | Pavel Kolchin, Robert M. Danen | 2018-06-05 |
| 9709510 | Determining a configuration for an optical element positioned in a collection aperture during wafer inspection | Pavel Kolchin, Junwei Wei, Dan Kapp, Robert M. Danen, Grace Hsiu-Ling Chen | 2017-07-18 |
| 9645093 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2017-05-09 |
| 9389349 | System and method to determine depth for optical wafer inspection | Pavel Kolchin, Robert M. Danen | 2016-07-12 |
| 9176069 | System and method for apodization in a semiconductor device inspection system | Jamie M. Sullivan, Gary Janik, Steve Cui, Rex Runyon, Dieter Wilk +8 more | 2015-11-03 |