| 12054826 |
ALD cycle time reduction using process chamber lid with tunable pumping |
Muhannad Mustafa, Muhammad M. Rasheed, Anqing Cui |
2024-08-06 |
| 11932939 |
Lids and lid assembly kits for atomic layer deposition chambers |
Muhammad M. Rasheed, Srinivas Gandikota, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more |
2024-03-19 |
| 11767590 |
ALD cycle time reduction using process chamber lid with tunable pumping |
Muhannad Mustafa, Muhammad M. Rasheed, Anqing Cui |
2023-09-26 |
| 11732358 |
High temperature chemical vapor deposition lid |
Muhannad Mustafa, Muhammad M. Rasheed, Srinivas Gandikota, Wei V. Tang |
2023-08-22 |
| 11719255 |
Pumping liner for improved flow uniformity |
Muhannad Mustafa, Muhammad M. Rasheed |
2023-08-08 |
| 11447866 |
High temperature chemical vapor deposition lid |
Muhannad Mustafa, Muhammad M. Rasheed, Srinivas Gandikota, Wei V. Tang |
2022-09-20 |
| 11415147 |
Pumping liner for improved flow uniformity |
Muhannad Mustafa, Muhammad M. Rasheed |
2022-08-16 |
| 11384432 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate |
Muhammad M. Rasheed, Srinivas Gandikota, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more |
2022-07-12 |
| 10755947 |
Methods of increasing selectivity for selective etch processes |
Wenyu Zhang, Yixiong Yang, Guoqiang Jian, Wei V. Tang, Paul F. Ma |
2020-08-25 |
| 10704142 |
Quick disconnect resistance temperature detector assembly for rotating pedestal |
Muhannad Mustafa, Muhammad M. Rasheed, Yu Chang, William Kuang, Vinod Konda Purathe +1 more |
2020-07-07 |
