Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538344 | Overlay and CD process window structure | Daniel J. Mellinger, Timothy C. Milmore | 2009-05-26 |
| 7372158 | HDP-based ILD capping layer | Yun-Yu Wang, Richard A. Conti, Chung-Ping Eng | 2008-05-13 |
| 7138717 | HDP-based ILD capping layer | Yun-Yu Wang, Richard A. Conti, Chung-Ping Eng | 2006-11-21 |
| 7060626 | Multi-run selective pattern and etch wafer process | Kenneth Bandy, Vincent J. Carlos, Mark D. Levy, Sara L. Lucas, Timothy C. Milmore +1 more | 2006-06-13 |
| 6967709 | Overlay and CD process window structure | Daniel J. Mellinger, Timothy C. Milmore | 2005-11-22 |
| 6856378 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Charles J. Parrish, Craig E. Schneider, Charles A. Whiting | 2005-02-15 |
| 6766507 | Mask/wafer control structure and algorithm for placement | James A. Bruce, Stephen E. Knight, Joshua J. Krueger, Jed H. Rankin | 2004-07-20 |
| 6716559 | Method and system for determining overlay tolerance | Robert K. Leidy, Timothy C. Milmore | 2004-04-06 |
| 6674516 | Method of photolithographic exposure dose control as a function of resist sensitivity | Keith J. Machia, Charles J. Parrish, Craig E. Schneider, Charles A. Whiting | 2004-01-06 |