Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7538344 | Overlay and CD process window structure | Daniel J. Mellinger, Matthew Nicholls | 2009-05-26 |
| 7060626 | Multi-run selective pattern and etch wafer process | Kenneth Bandy, Vincent J. Carlos, Mark D. Levy, Sara L. Lucas, Matthew Nicholls +1 more | 2006-06-13 |
| 6967709 | Overlay and CD process window structure | Daniel J. Mellinger, Matthew Nicholls | 2005-11-22 |
| 6716559 | Method and system for determining overlay tolerance | Robert K. Leidy, Matthew Nicholls | 2004-04-06 |